Performance Analysis of Different Slot Waveguide Structures for

Abstract—In this paper, a dielectric rib-like-based slot waveguide is introduced for nonlinear silicon photonics In the slot region of

slot waveguide, respectively Keywords: PECVD, ALD, Silicon Carbide, TiO2, Slot Waveguides, Sensing INTRODUCTION Slot waveguides enable high confinement of

slot die We first demonstrated a slot waveguide based on a Ge-on-Si platform with a 3 μm thickness of the Ge in the mid-infrared wavelength

slot powers no deposit bonus A fully suspended slot waveguide platform, including straight slot waveguides, 90° bends, high-Q racetrack resonators, and strip-to-slot mode